Nanometrology involves the measurement of geometrical features of size, shape and roughness at the nanoscale. A nanometrology infrastructure is also a prerequisite for documentary standards and regulations involving nanotechnology, which to be effective must be written in terms of measurable quantities and levels, tolerances and uncertainties, incorporating reliable measurement instruments and techniques. The aim is to advance the boundaries of knowledge in instrumentation and metrology and to bring state-of-the-art tools and techniques to bear in the development of standards for the nanotechnology community. Some of the most common techniques used in nanometrology are atomic force microscopy, electron microscopy and X-ray diffraction. Nanometrology has a crucial role in order to produce nanomaterials and devices with a high degree of accuracy and reliability in nanomanufacturing. Nanometrology has a crucial role in order to produce nanomaterials and devices with a high degree of accuracy and reliability in nanomanufacturing.

  • Manufacturing
  • Nanotechnology
  • Surface finishing
  • Calibration
  • Geometrical optics

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